Coverart for item
The Resource Emerging lithographic technologies VI : 5-7 March, 2002, Santa Clara, [California], USA, Roxann L. Engelstad, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH

Emerging lithographic technologies VI : 5-7 March, 2002, Santa Clara, [California], USA, Roxann L. Engelstad, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH

Label
Emerging lithographic technologies VI : 5-7 March, 2002, Santa Clara, [California], USA
Title
Emerging lithographic technologies VI
Title remainder
5-7 March, 2002, Santa Clara, [California], USA
Statement of responsibility
Roxann L. Engelstad, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
LC call number
TK7874
LC item number
.E53x 2002
Literary form
non fiction
Nature of contents
bibliography
Series statement
Proceedings of SPIE
Series volume
v. 4688
Emerging lithographic technologies VI : 5-7 March, 2002, Santa Clara, [California], USA, Roxann L. Engelstad, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Label
Emerging lithographic technologies VI : 5-7 March, 2002, Santa Clara, [California], USA, Roxann L. Engelstad, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Publication
Related Contributor
Related Location
Related Agents
Related Authorities
Related Subjects
Related Items
Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819444349&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1480622'}
Extent
2 v. (xiv, 950 p.)
Isbn
9780819444349
Lccn
2002512442
Other physical details
ill.

Library Locations

    • Folsom LibraryBorrow it
      110 8th St, Troy, NY, 12180, US
      42.729766 -73.682577
Processing Feedback ...