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The Resource Emerging lithographic technologies III : 15-17 March, 1999, Santa Clara, California, Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Emerging lithographic technologies III : 15-17 March, 1999, Santa Clara, California, Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Label
Emerging lithographic technologies III : 15-17 March, 1999, Santa Clara, California
Title
Emerging lithographic technologies III
Title remainder
15-17 March, 1999, Santa Clara, California
Statement of responsibility
Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Title variation
Emerging lithographic technologies 3
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
Proceedings of SPIE
Series volume
v. 3676
Emerging lithographic technologies III : 15-17 March, 1999, Santa Clara, California, Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Label
Emerging lithographic technologies III : 15-17 March, 1999, Santa Clara, California, Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Publication
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1389233'}
Extent
2 v. (xvii, 864 p.)
Isbn
9780819431509
Other physical details
ill.

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