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The Resource Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California, Yuli Vladimirsky, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH

Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California, Yuli Vladimirsky, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH

Label
Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California
Title
Emerging lithographic technologies II
Title remainder
23-25 February 1998, Santa Clara, California
Statement of responsibility
Yuli Vladimirsky, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Title variation
Emerging lithographic technologies 2
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Index
index present
Literary form
non fiction
Series statement
SPIE proceedings series
Series volume
v. 3331
Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California, Yuli Vladimirsky, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Label
Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California, Yuli Vladimirsky, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
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Bibliography note
Includes bibliographical references and index
http://library.link/vocab/cover_art
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1353867'}
Extent
xiii, 702 p.
Isbn
9780819427762
Other physical details
ill.

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