Coverart for item
The Resource Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California, David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH

Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California, David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH

Label
Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California
Title
Emerging lithographic technologies
Title remainder
10-11 March 1997, Santa Clara, California
Statement of responsibility
David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 3048
Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California, David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Label
Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California, David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Publication
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Bibliography note
Includes bibliographical references and index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819424624&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1343571'}
Extent
ix, 412 p.
Isbn
9780819424624
Other physical details
ill.

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