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The Resource Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V, (electronic resource)

Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V, (electronic resource)

Label
Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V
Title
Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V
Language
eng
Member of
Series statement
SPIE proceedings series,
Series volume
v.0632
Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V, (electronic resource)
Label
Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V, (electronic resource)
Link
http://libproxy.rpi.edu/login?url=http://proceedings.spiedigitallibrary.org/volume.aspx?volume=0632
Publication
Note
Proceedings
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{'f': 'http://opac.lib.rpi.edu/record=b4215302'}
Isbn
9780892526673
Specific material designation
remote

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