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The Resource Effects of sputtering parameters on electromigration in aluminum interconnections

Effects of sputtering parameters on electromigration in aluminum interconnections

Label
Effects of sputtering parameters on electromigration in aluminum interconnections
Title
Effects of sputtering parameters on electromigration in aluminum interconnections
Creator
Contributor
Dissertation note
Thesis (Ph.D.)--Rensselaer Polytechnic Institute, August, 1993.
Effects of sputtering parameters on electromigration in aluminum interconnections
Label
Effects of sputtering parameters on electromigration in aluminum interconnections
Publication
Note
UMI no. 9405684
Related Contributor
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1242455'}
Extent
xii, 164 p.
Other physical details
ill.

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