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The Resource Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia, Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)

Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia, Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)

Label
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia
Title
Device and process technologies for MEMS, microelectronics, and photonics III
Title remainder
10-12 December 2003, Perth, Australia
Statement of responsibility
Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)
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Subject
Genre
Language
eng
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Cataloging source
CUS
Index
index present
Literary form
non fiction
Series statement
SPIE proceedings series,
Series volume
v. 5276
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia, Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)
Label
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia, Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)
Publication
Note
Earlier conferences have title: Device and process technologies for MEMS and microelectronics
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819451699&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1615972'}
Extent
xxxiv, 566 p.
Isbn
9780819451699
Other physical details
ill.

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