Coverart for item
The Resource Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia, Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]

Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia, Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]

Label
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
Title
Device and process technologies for MEMS and microelectronics
Title remainder
27-29 October 1999, Royal Pines Resort, Queensland, Australia
Statement of responsibility
Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Index
index present
Literary form
non fiction
Series statement
SPIE proceedings series
Series volume
v. 3892
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia, Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]
Label
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia, Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]
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Bibliography note
Includes bibliographical references and index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819434937&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1375412'}
Extent
vii, 394 p.
Isbn
9780819434937
Other physical details
ill.

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