Coverart for item
The Resource Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia, Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section

Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia, Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section

Label
Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
Title
Device and process technologies for MEMS and microelectronics II
Title remainder
17-19 December, 2001, Adelaide, Australia
Statement of responsibility
Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 4592
Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia, Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section
Label
Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia, Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section
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Bibliography note
Includes bibliographic references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819443229&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1430321'}
Extent
xi, 538 p.
Isbn
9780819443229
Other physical details
ill.

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