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The Resource Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification, edited by Rajiv Kohli and K.L. Mittal

Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification, edited by Rajiv Kohli and K.L. Mittal

Label
Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification
Title
Developments in surface contamination and cleaning
Title number
Volume 7
Title part
Cleanliness validation and verification
Statement of responsibility
edited by Rajiv Kohli and K.L. Mittal
Contributor
Editor
Subject
Language
eng
Summary
As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography
Cataloging source
EBLCP
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification, edited by Rajiv Kohli and K.L. Mittal
Label
Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification, edited by Rajiv Kohli and K.L. Mittal
Link
http://libproxy.rpi.edu/login?url=http://app.knovel.com/hotlink/toc/id:kpDSCCVCV1/developments-in-surface
Publication
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Antecedent source
unknown
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
txt
Content type MARC source
rdacontent
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780323313032&userID=ebsco-test&password=ebsco-test
Dimensions
unknown
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b3822367'}
Edition
First edition.
Extent
1 online resource (207 pages)
File format
unknown
Form of item
online
Isbn
9780323313032
Level of compression
unknown
Media category
computer
Media MARC source
rdamedia
Media type code
c
Quality assurance targets
not applicable
Reformatting quality
unknown
Sound
unknown sound
Specific material designation
remote

Library Locations

    • Folsom LibraryBorrow it
      110 8th St, Troy, NY, 12180, US
      42.729766 -73.682577
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