The Resource Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification, edited by Rajiv Kohli and K.L. Mittal
Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification, edited by Rajiv Kohli and K.L. Mittal
- Summary
- As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography
- Language
- eng
- Edition
- First edition.
- Extent
- 1 online resource (207 pages)
- Isbn
- 9780323311458
- Label
- Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification
- Title
- Developments in surface contamination and cleaning
- Title number
- Volume 7
- Title part
- Cleanliness validation and verification
- Statement of responsibility
- edited by Rajiv Kohli and K.L. Mittal
- Language
- eng
- Summary
- As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography
- Cataloging source
- EBLCP
- Index
- index present
- Literary form
- non fiction
- Nature of contents
-
- dictionaries
- bibliography
- Label
- Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification, edited by Rajiv Kohli and K.L. Mittal
- Link
- http://libproxy.rpi.edu/login?url=http://app.knovel.com/hotlink/toc/id:kpDSCCVCV1/developments-in-surface
- Antecedent source
- unknown
- Bibliography note
- Includes bibliographical references and index
- Carrier category
- online resource
- Carrier category code
- cr
- Carrier MARC source
- rdacarrier
- Color
- multicolored
- Content category
- text
- Content type code
- txt
- Content type MARC source
- rdacontent
- http://library.link/vocab/cover_art
- https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780323311458&userID=ebsco-test&password=ebsco-test
- Dimensions
- unknown
- http://library.link/vocab/discovery_link
- {'f': 'http://opac.lib.rpi.edu/record=b3822367'}
- Edition
- First edition.
- Extent
- 1 online resource (207 pages)
- File format
- unknown
- Form of item
- online
- Isbn
- 9780323311458
- Level of compression
- unknown
- Media category
- computer
- Media MARC source
- rdamedia
- Media type code
- c
- Quality assurance targets
- not applicable
- Reformatting quality
- unknown
- Sound
- unknown sound
- Specific material designation
- remote
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.lib.rpi.edu/portal/Developments-in-surface-contamination-and/9v1FJ8dCg4c/" typeof="WorkExample http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.lib.rpi.edu/portal/Developments-in-surface-contamination-and/9v1FJ8dCg4c/">Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification, edited by Rajiv Kohli and K.L. Mittal</a></span> - <span property="offers" typeOf="Offer"><span property="offeredBy" typeof="Library ll:Library" resource="http://link.lib.rpi.edu/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.lib.rpi.edu/">Rensselaer Libraries</a></span></span></span></span></div>
