Coverart for item
The Resource Developments in Semiconductor Microlithography, (electronic resource)

Developments in Semiconductor Microlithography, (electronic resource)

Label
Developments in Semiconductor Microlithography
Title
Developments in Semiconductor Microlithography
Language
eng
Member of
Series statement
SPIE proceedings series,
Series volume
v.0080
Developments in Semiconductor Microlithography, (electronic resource)
Label
Developments in Semiconductor Microlithography, (electronic resource)
Link
http://libproxy.rpi.edu/login?url=http://proceedings.spiedigitallibrary.org/volume.aspx?volume=0080
Publication
Note
Proceedings
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Dimensions
unknown
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b4214768'}
Isbn
9780892521074
Specific material designation
remote

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