Coverart for item
The Resource Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA, Kenneth W. Tobin, Jr., chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH

Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA, Kenneth W. Tobin, Jr., chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH

Label
Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA
Title
Data analysis and modeling for process control
Title remainder
26-27 February 2004, Santa Clara, California, USA
Statement of responsibility
Kenneth W. Tobin, Jr., chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series,
Series volume
v. 5378
Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA, Kenneth W. Tobin, Jr., chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH
Label
Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA, Kenneth W. Tobin, Jr., chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH
Publication
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Related Authorities
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819452917&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1632224'}
Extent
xxx, 248 p.
Isbn
9780819452917
Other physical details
ill.

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