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The Resource DC planar magnetron sputtering: the influence of deposition conditions on the properties of titanium thin films

DC planar magnetron sputtering: the influence of deposition conditions on the properties of titanium thin films

Label
DC planar magnetron sputtering: the influence of deposition conditions on the properties of titanium thin films
Title
DC planar magnetron sputtering: the influence of deposition conditions on the properties of titanium thin films
Creator
Contributor
Dissertation note
Thesis (master's)--Rensselaer Polytechnic Institute, May 1986.
DC planar magnetron sputtering: the influence of deposition conditions on the properties of titanium thin films
Label
DC planar magnetron sputtering: the influence of deposition conditions on the properties of titanium thin films
Publication
Related Contributor
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1173850'}
Extent
87 p.

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