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The Resource Comparison of TEM and ellipsometric SIO(sub 2) thickness measurements
Label
Comparison of TEM and ellipsometric SIO(sub 2) thickness measurements
Title
Comparison of TEM and ellipsometric SIO(sub 2) thickness measurements
Creator
Contributor
Dissertation note
Thesis (master's)--Rensselaer Polytechnic Institute, December, 1990.
Comparison of TEM and ellipsometric SIO(sub 2) thickness measurements
Label
Comparison of TEM and ellipsometric SIO(sub 2) thickness measurements
Publication
Related Contributor
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1210796'}
Extent
33 p.

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