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The Resource Chemical vapor deposition of aluminum oxide from aluminum beta-diketonate precursors

Chemical vapor deposition of aluminum oxide from aluminum beta-diketonate precursors

Label
Chemical vapor deposition of aluminum oxide from aluminum beta-diketonate precursors
Title
Chemical vapor deposition of aluminum oxide from aluminum beta-diketonate precursors
Creator
Contributor
Dissertation note
Thesis (master's)--Rensselaer Polytechnic Institute, December, 1992.
Chemical vapor deposition of aluminum oxide from aluminum beta-diketonate precursors
Label
Chemical vapor deposition of aluminum oxide from aluminum beta-diketonate precursors
Publication
Related Contributor
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1233532'}
Extent
vii, 53 p.
Other physical details
ill.

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