Coverart for item
The Resource Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA, David Burnett, Shinʼichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)

Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA, David Burnett, Shinʼichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)

Label
Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
Title
Challenges in process integration and device technology
Title remainder
18-19 September 2000, Santa Clara, USA
Statement of responsibility
David Burnett, Shinʼichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Index
index present
Literary form
non fiction
Series statement
SPIE proceedings series
Series volume
v. 4181
Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA, David Burnett, Shinʼichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)
Label
Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA, David Burnett, Shinʼichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)
Publication
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819438423&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1389400'}
Extent
ix, 344 p.
Isbn
9780819438423
Other physical details
ill.

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