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The Resource Atomic layer growth and processing : symposium held April 29- May 1, 1991, Anaheim, California, U.S.A., editors, T.F. Kuech, P.D. Dapkus, Y. Aoyagi

Atomic layer growth and processing : symposium held April 29- May 1, 1991, Anaheim, California, U.S.A., editors, T.F. Kuech, P.D. Dapkus, Y. Aoyagi

Label
Atomic layer growth and processing : symposium held April 29- May 1, 1991, Anaheim, California, U.S.A.
Title
Atomic layer growth and processing
Title remainder
symposium held April 29- May 1, 1991, Anaheim, California, U.S.A.
Statement of responsibility
editors, T.F. Kuech, P.D. Dapkus, Y. Aoyagi
Contributor
Subject
Genre
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Series statement
Materials Research Society symposium proceedings
Series volume
v. 222
Atomic layer growth and processing : symposium held April 29- May 1, 1991, Anaheim, California, U.S.A., editors, T.F. Kuech, P.D. Dapkus, Y. Aoyagi
Label
Atomic layer growth and processing : symposium held April 29- May 1, 1991, Anaheim, California, U.S.A., editors, T.F. Kuech, P.D. Dapkus, Y. Aoyagi
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Bibliography note
Includes bibliographical references and index
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Dimensions
24 cm.
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{'f': 'http://opac.lib.rpi.edu/record=b1219673'}
Extent
xiii, 360 p.
Isbn
9781558991163
Lccn
91-26832
Other physical details
ill.

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