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The Resource Anodic bonding of silicon and glass for micromachined pressure sensors
Label
Anodic bonding of silicon and glass for micromachined pressure sensors
Title
Anodic bonding of silicon and glass for micromachined pressure sensors
Creator
Contributor
Dissertation note
Thesis (master's)--Rensselaer Polytechnic Institute, May, 1995.
Anodic bonding of silicon and glass for micromachined pressure sensors
Label
Anodic bonding of silicon and glass for micromachined pressure sensors
Publication
Related Contributor
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1267111'}
Extent
vii, 77 p.
Other physical details
ill.

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