Coverart for item
The Resource Advances in resist technology and processing XV : 23-25 February, 1998, Santa Clara, California, Will Conley, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH

Advances in resist technology and processing XV : 23-25 February, 1998, Santa Clara, California, Will Conley, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH

Label
Advances in resist technology and processing XV : 23-25 February, 1998, Santa Clara, California
Title
Advances in resist technology and processing XV
Title remainder
23-25 February, 1998, Santa Clara, California
Statement of responsibility
Will Conley, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Title variation
Advances in resist technology and processing 15
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
Proceedings SPIE--the International Society for Optical Engineering
Series volume
v. 3333
Advances in resist technology and processing XV : 23-25 February, 1998, Santa Clara, California, Will Conley, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Label
Advances in resist technology and processing XV : 23-25 February, 1998, Santa Clara, California, Will Conley, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Publication
Related Contributor
Related Location
Related Agents
Related Authorities
Related Subjects
Related Items
Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819427786&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1353875'}
Extent
2 v. (xvii, 1464 p.)
Isbn
9780819427786
Other physical details
ill.

Library Locations

    • Folsom LibraryBorrow it
      110 8th St, Troy, NY, 12180, US
      42.729766 -73.682577
Processing Feedback ...