Coverart for item
The Resource Advances in resist technology and processing XIII : 11-13 March 1996, Santa Clara, California, Roderick R. Kunz, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH

Advances in resist technology and processing XIII : 11-13 March 1996, Santa Clara, California, Roderick R. Kunz, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH

Label
Advances in resist technology and processing XIII : 11-13 March 1996, Santa Clara, California
Title
Advances in resist technology and processing XIII
Title remainder
11-13 March 1996, Santa Clara, California
Statement of responsibility
Roderick R. Kunz, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Title variation
Advances in resist technology and processing 13
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
HPN
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
Proceedings SPIE--the International Society for Optical Engineering
Series volume
v. 2724
Advances in resist technology and processing XIII : 11-13 March 1996, Santa Clara, California, Roderick R. Kunz, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Label
Advances in resist technology and processing XIII : 11-13 March 1996, Santa Clara, California, Roderick R. Kunz, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
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Bibliography note
Includes bibliographical references and index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819421005&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1337251'}
Extent
xi, 774 p.
Isbn
9780819421005
Lccn
91061057
Other physical details
ill.

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