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The Resource Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California, Robert D. Allen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California, Robert D. Allen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Label
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California
Title
Advances in resist technology and processing XII
Title remainder
20-22 February 1995, Santa Clara, California
Statement of responsibility
Robert D. Allen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Title variation
Advances in resist technology and processing 12
Contributor
Subject
Genre
Member of
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 2438
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California, Robert D. Allen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Label
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California, Robert D. Allen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Publication
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Bibliography note
Includes bibliographic references and author index
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Dimensions
28 cm.
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{'f': 'http://opac.lib.rpi.edu/record=b1264243'}
Extent
xiii, 904 p.
Isbn
9780819417862
Lccn
94-69901
Other physical details
ill.

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