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The Resource Advances in resist technology and processing VIII : 4-5 March, 1991, San Jose, California, Hiroshi Ito, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

Advances in resist technology and processing VIII : 4-5 March, 1991, San Jose, California, Hiroshi Ito, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

Label
Advances in resist technology and processing VIII : 4-5 March, 1991, San Jose, California
Title
Advances in resist technology and processing VIII
Title remainder
4-5 March, 1991, San Jose, California
Statement of responsibility
Hiroshi Ito, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
Title variation
Advances in resist technology and processing 8
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Subject
Genre
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Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 1466
Advances in resist technology and processing VIII : 4-5 March, 1991, San Jose, California, Hiroshi Ito, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
Label
Advances in resist technology and processing VIII : 4-5 March, 1991, San Jose, California, Hiroshi Ito, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
Publication
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Bibliography note
Includes bibliographical references and index
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Dimensions
28 cm.
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{'f': 'http://opac.lib.rpi.edu/record=b1221642'}
Extent
xii, 679 p.
Isbn
9780819405654
Other physical details
ill.

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