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The Resource Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California, Murrae J. Bowden, chair/editor

Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California, Murrae J. Bowden, chair/editor

Label
Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California
Title
Advances in resist technology and processing IV
Title remainder
2-3 March 1987, Santa Clara, California
Statement of responsibility
Murrae J. Bowden, chair/editor
Title variation
Advances in resist technology and processing 4
Contributor
Subject
Genre
Member of
Series statement
Proceedings of SPIE--the International Society for Optical Engineering
Series volume
v. 771
Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California, Murrae J. Bowden, chair/editor
Label
Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California, Murrae J. Bowden, chair/editor
Publication
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Bibliography note
Includes bibliographies and index
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Dimensions
29 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1164471'}
Extent
vi, 367 p.
Isbn
9780892528066
Lccn
87-60739
Other physical details
ill.

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