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The Resource Advances in resist technology : March 12-13, 1984, Santa Clara, California, C. Grant Willson, chairman/editor

Advances in resist technology : March 12-13, 1984, Santa Clara, California, C. Grant Willson, chairman/editor

Label
Advances in resist technology : March 12-13, 1984, Santa Clara, California
Title
Advances in resist technology
Title remainder
March 12-13, 1984, Santa Clara, California
Statement of responsibility
C. Grant Willson, chairman/editor
Contributor
Subject
Genre
Member of
Series statement
Proceedings of SPIE--the International Society for Optical Engineering
Series volume
v. 469
Advances in resist technology : March 12-13, 1984, Santa Clara, California, C. Grant Willson, chairman/editor
Label
Advances in resist technology : March 12-13, 1984, Santa Clara, California, C. Grant Willson, chairman/editor
Publication
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Bibliography note
Includes bibliographies and index
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Dimensions
28 cm.
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{'f': 'http://opac.lib.rpi.edu/record=b1137493'}
Extent
vi, 195 p.
Isbn
9780892525041
Isbn Type
(pbk.)
Lccn
84-50823
Other physical details
ill.

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