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The Resource Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida, Sayan D. Mukherjee, editor ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating sponsor, The Metallurgical Society

Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida, Sayan D. Mukherjee, editor ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating sponsor, The Metallurgical Society

Label
Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida
Title
Advanced processing of semiconductor devices
Title remainder
23-25 March 1987, Bay Point, Florida
Statement of responsibility
Sayan D. Mukherjee, editor ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating sponsor, The Metallurgical Society
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Subject
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Series statement
Proceedings of SPIE--the International Society for Optical Engineering
Series volume
v. 797
Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida, Sayan D. Mukherjee, editor ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating sponsor, The Metallurgical Society
Label
Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida, Sayan D. Mukherjee, editor ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating sponsor, The Metallurgical Society
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Bibliography note
Includes bibliographical references and author index
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Dimensions
28 cm.
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Extent
x, 366 p.
Isbn
9780892528325
Isbn Type
(pbk.) :
Lccn
87-61010
Other physical details
ill.

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