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The Resource A plasma diagnostic study of the reactive ion etching of copper

A plasma diagnostic study of the reactive ion etching of copper

Label
A plasma diagnostic study of the reactive ion etching of copper
Title
A plasma diagnostic study of the reactive ion etching of copper
Creator
Contributor
Dissertation note
Thesis (Ph.D.)--Rensselaer Polytechnic Institute, May, 1993.
A plasma diagnostic study of the reactive ion etching of copper
Label
A plasma diagnostic study of the reactive ion etching of copper
Publication
Note
UMI no. 9325245
Related Contributor
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1237259'}
Extent
xii, 128 p.
Other physical details
ill.

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