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The Resource A guide to hands-on MEMS design and prototyping, Joel Kubby

A guide to hands-on MEMS design and prototyping, Joel Kubby

Label
A guide to hands-on MEMS design and prototyping
Title
A guide to hands-on MEMS design and prototyping
Statement of responsibility
Joel Kubby
Creator
Subject
Language
eng
Summary
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--
Assigning source
Provided by publisher
Cataloging source
N$T
Illustrations
  • illustrations
  • plates
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
A guide to hands-on MEMS design and prototyping, Joel Kubby
Label
A guide to hands-on MEMS design and prototyping, Joel Kubby
Link
http://libproxy.rpi.edu/login?url=http://app.knovel.com/hotlink/toc/id:kpGHMEMSD1/guide-to-hands
Publication
Related Contributor
Related Location
Related Agents
Related Authorities
Related Subjects
Antecedent source
unknown
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
Preface; 1 Introduction; 2 Micromechanics; 3 Electrostatic Actuation; 4 Optical MEMS; 5 Thermal MEMS; 6 Fluidic MEMS; 7 Package and Test; 8 From Prototype to Product: MEMS Deformable Mirrors for Adaptive Optics
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780511984662&userID=ebsco-test&password=ebsco-test
Dimensions
unknown
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b3763784'}
Extent
1 online resource (xi, 166 pages, [16] pages of plates)
File format
unknown
Form of item
online
Isbn
9780511984662
Level of compression
unknown
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations (some color)
Quality assurance targets
not applicable
Reformatting quality
unknown
Sound
unknown sound
Specific material designation
remote

Library Locations

    • Folsom LibraryBorrow it
      110 8th St, Troy, NY, 12180, US
      42.729766 -73.682577
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